7/24/2011	3:17:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/24/2011	3:17:02 PM	Recipe started at 3:17 PM
7/24/2011	3:17:02 PM	Helium valve closed
7/24/2011	3:17:02 PM	H2 valve closed
7/24/2011	3:17:02 PM	BCl3 valve closed
7/24/2011	3:17:02 PM	PH3 valve closed
7/24/2011	3:17:02 PM	SiCl4 pre valve closed
7/24/2011	3:17:02 PM	SiCl4 post valve closed
7/24/2011	3:17:02 PM	Main Vac valve closed
7/24/2011	3:17:02 PM	Bypass valve closed
7/24/2011	3:17:02 PM	Bubbler valve closed
7/24/2011	3:17:02 PM	Helium MFC set to  0.000000
7/24/2011	3:17:02 PM	H2 MFC set to  0.000000
7/24/2011	3:17:02 PM	BCl3 MFC set to  0.000000
7/24/2011	3:17:02 PM	PHl3 MFC set to  0.000000
7/24/2011	3:17:02 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:17:02 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:17:03 PM	Tube furnace set to 0
7/24/2011	3:17:06 PM	H2 valve closed
7/24/2011	3:17:06 PM	BCl3 valve closed
7/24/2011	3:17:06 PM	PH3 valve closed
7/24/2011	3:17:06 PM	SiCl4 pre valve closed
7/24/2011	3:17:06 PM	SiCl4 post valve closed
7/24/2011	3:17:06 PM	Main Vac valve closed
7/24/2011	3:17:06 PM	Bypass valve closed
7/24/2011	3:17:06 PM	Bubbler valve closed
7/24/2011	3:17:06 PM	Helium valve opened
7/24/2011	3:17:06 PM	Helium MFC set to  500.000000
7/24/2011	3:17:06 PM	H2 MFC set to  0.000000
7/24/2011	3:17:06 PM	BCl3 MFC set to  0.000000
7/24/2011	3:17:06 PM	PHl3 MFC set to  0.000000
7/24/2011	3:17:06 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:17:06 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:17:06 PM	Tube furnace set to 0
7/24/2011	3:18:11 PM	Helium valve closed
7/24/2011	3:18:11 PM	H2 valve closed
7/24/2011	3:18:11 PM	BCl3 valve closed
7/24/2011	3:18:11 PM	PH3 valve closed
7/24/2011	3:18:11 PM	SiCl4 pre valve closed
7/24/2011	3:18:11 PM	SiCl4 post valve closed
7/24/2011	3:18:11 PM	Main Vac valve closed
7/24/2011	3:18:11 PM	Bypass valve closed
7/24/2011	3:18:11 PM	Bubbler valve closed
7/24/2011	3:18:11 PM	Helium MFC set to  0.000000
7/24/2011	3:18:11 PM	H2 MFC set to  0.000000
7/24/2011	3:18:11 PM	BCl3 MFC set to  0.000000
7/24/2011	3:18:11 PM	PHl3 MFC set to  0.000000
7/24/2011	3:18:11 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:18:11 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:18:11 PM	Tube furnace set to 0
7/24/2011	3:18:12 PM	Run finished at 3:18 PM
7/24/2011	3:18:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/24/2011	3:28:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/24/2011	3:28:32 PM	Recipe started at 3:28 PM
7/24/2011	3:28:32 PM	Helium valve closed
7/24/2011	3:28:32 PM	H2 valve closed
7/24/2011	3:28:32 PM	BCl3 valve closed
7/24/2011	3:28:32 PM	PH3 valve closed
7/24/2011	3:28:32 PM	SiCl4 pre valve closed
7/24/2011	3:28:32 PM	SiCl4 post valve closed
7/24/2011	3:28:32 PM	Main Vac valve closed
7/24/2011	3:28:32 PM	Bubbler valve closed
7/24/2011	3:28:32 PM	Bypass valve opened
7/24/2011	3:28:32 PM	Helium MFC set to  0.000000
7/24/2011	3:28:32 PM	H2 MFC set to  0.000000
7/24/2011	3:28:32 PM	BCl3 MFC set to  0.000000
7/24/2011	3:28:32 PM	PHl3 MFC set to  0.000000
7/24/2011	3:28:32 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:28:32 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:28:32 PM	Tube furnace set to 0
7/24/2011	3:29:41 PM	Helium valve closed
7/24/2011	3:29:41 PM	H2 valve closed
7/24/2011	3:29:41 PM	BCl3 valve closed
7/24/2011	3:29:41 PM	PH3 valve closed
7/24/2011	3:29:41 PM	SiCl4 pre valve closed
7/24/2011	3:29:41 PM	SiCl4 post valve closed
7/24/2011	3:29:41 PM	Main Vac valve closed
7/24/2011	3:29:41 PM	Bubbler valve closed
7/24/2011	3:29:41 PM	Bypass valve opened
7/24/2011	3:29:41 PM	Helium MFC set to  0.000000
7/24/2011	3:29:41 PM	H2 MFC set to  0.000000
7/24/2011	3:29:41 PM	BCl3 MFC set to  0.000000
7/24/2011	3:29:41 PM	PHl3 MFC set to  0.000000
7/24/2011	3:29:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:29:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:29:41 PM	Tube furnace set to 0
7/24/2011	3:30:41 PM	Helium valve closed
7/24/2011	3:30:41 PM	H2 valve closed
7/24/2011	3:30:41 PM	BCl3 valve closed
7/24/2011	3:30:41 PM	PH3 valve closed
7/24/2011	3:30:41 PM	SiCl4 pre valve closed
7/24/2011	3:30:41 PM	SiCl4 post valve closed
7/24/2011	3:30:41 PM	Bypass valve closed
7/24/2011	3:30:41 PM	Bubbler valve closed
7/24/2011	3:30:41 PM	Main Vac valve opened
7/24/2011	3:30:41 PM	Helium MFC set to  0.000000
7/24/2011	3:30:41 PM	H2 MFC set to  0.000000
7/24/2011	3:30:41 PM	BCl3 MFC set to  0.000000
7/24/2011	3:30:41 PM	PHl3 MFC set to  0.000000
7/24/2011	3:30:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	3:30:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	3:30:41 PM	Tube furnace set to 0
7/24/2011	3:30:42 PM	Run finished at 3:30 PM
7/24/2011	3:30:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/24/2011	4:05:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/24/2011	4:05:40 PM	Recipe started at 4:05 PM
7/24/2011	4:05:40 PM	Helium valve closed
7/24/2011	4:05:40 PM	H2 valve closed
7/24/2011	4:05:40 PM	BCl3 valve closed
7/24/2011	4:05:40 PM	PH3 valve closed
7/24/2011	4:05:40 PM	SiCl4 pre valve closed
7/24/2011	4:05:40 PM	SiCl4 post valve closed
7/24/2011	4:05:40 PM	Main Vac valve closed
7/24/2011	4:05:40 PM	Bubbler valve closed
7/24/2011	4:05:40 PM	Bypass valve opened
7/24/2011	4:05:40 PM	Helium MFC set to  0.000000
7/24/2011	4:05:40 PM	H2 MFC set to  0.000000
7/24/2011	4:05:40 PM	BCl3 MFC set to  0.000000
7/24/2011	4:05:40 PM	PHl3 MFC set to  0.000000
7/24/2011	4:05:40 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:05:40 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:05:40 PM	Tube furnace set to 0
7/24/2011	4:05:41 PM	Helium valve closed
7/24/2011	4:05:41 PM	H2 valve closed
7/24/2011	4:05:41 PM	BCl3 valve closed
7/24/2011	4:05:41 PM	PH3 valve closed
7/24/2011	4:05:41 PM	SiCl4 pre valve closed
7/24/2011	4:05:41 PM	SiCl4 post valve closed
7/24/2011	4:05:41 PM	Main Vac valve closed
7/24/2011	4:05:41 PM	Bubbler valve closed
7/24/2011	4:05:41 PM	Bypass valve opened
7/24/2011	4:05:41 PM	Helium MFC set to  0.000000
7/24/2011	4:05:41 PM	H2 MFC set to  0.000000
7/24/2011	4:05:41 PM	BCl3 MFC set to  0.000000
7/24/2011	4:05:41 PM	PHl3 MFC set to  0.000000
7/24/2011	4:05:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:05:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:05:41 PM	Tube furnace set to 0
7/24/2011	4:06:11 PM	Helium valve closed
7/24/2011	4:06:11 PM	H2 valve closed
7/24/2011	4:06:11 PM	BCl3 valve closed
7/24/2011	4:06:11 PM	PH3 valve closed
7/24/2011	4:06:11 PM	SiCl4 pre valve closed
7/24/2011	4:06:11 PM	SiCl4 post valve closed
7/24/2011	4:06:11 PM	Bypass valve closed
7/24/2011	4:06:11 PM	Bubbler valve closed
7/24/2011	4:06:11 PM	Main Vac valve opened
7/24/2011	4:06:11 PM	Helium MFC set to  0.000000
7/24/2011	4:06:11 PM	H2 MFC set to  0.000000
7/24/2011	4:06:11 PM	BCl3 MFC set to  0.000000
7/24/2011	4:06:11 PM	PHl3 MFC set to  0.000000
7/24/2011	4:06:11 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:06:11 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:06:11 PM	Tube furnace set to 0
7/24/2011	4:06:41 PM	H2 valve closed
7/24/2011	4:06:41 PM	BCl3 valve closed
7/24/2011	4:06:41 PM	PH3 valve closed
7/24/2011	4:06:41 PM	SiCl4 pre valve closed
7/24/2011	4:06:41 PM	SiCl4 post valve closed
7/24/2011	4:06:41 PM	Bypass valve closed
7/24/2011	4:06:41 PM	Bubbler valve closed
7/24/2011	4:06:41 PM	Helium valve opened
7/24/2011	4:06:41 PM	Main Vac valve opened
7/24/2011	4:06:41 PM	Helium MFC set to  20.000000
7/24/2011	4:06:41 PM	H2 MFC set to  0.000000
7/24/2011	4:06:41 PM	BCl3 MFC set to  0.000000
7/24/2011	4:06:41 PM	PHl3 MFC set to  0.000000
7/24/2011	4:06:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:06:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:06:41 PM	Tube furnace set to 0
7/24/2011	4:07:11 PM	Helium valve closed
7/24/2011	4:07:11 PM	H2 valve closed
7/24/2011	4:07:11 PM	BCl3 valve closed
7/24/2011	4:07:11 PM	PH3 valve closed
7/24/2011	4:07:11 PM	SiCl4 pre valve closed
7/24/2011	4:07:11 PM	SiCl4 post valve closed
7/24/2011	4:07:11 PM	Bypass valve closed
7/24/2011	4:07:11 PM	Bubbler valve closed
7/24/2011	4:07:11 PM	Main Vac valve opened
7/24/2011	4:07:11 PM	Helium MFC set to  0.000000
7/24/2011	4:07:11 PM	H2 MFC set to  0.000000
7/24/2011	4:07:11 PM	BCl3 MFC set to  0.000000
7/24/2011	4:07:11 PM	PHl3 MFC set to  0.000000
7/24/2011	4:07:11 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:07:11 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:07:11 PM	Tube furnace set to 0
7/24/2011	4:07:41 PM	H2 valve closed
7/24/2011	4:07:41 PM	BCl3 valve closed
7/24/2011	4:07:41 PM	PH3 valve closed
7/24/2011	4:07:41 PM	SiCl4 pre valve closed
7/24/2011	4:07:41 PM	SiCl4 post valve closed
7/24/2011	4:07:41 PM	Bypass valve closed
7/24/2011	4:07:41 PM	Bubbler valve closed
7/24/2011	4:07:41 PM	Helium valve opened
7/24/2011	4:07:41 PM	Main Vac valve opened
7/24/2011	4:07:41 PM	Helium MFC set to  20.000000
7/24/2011	4:07:41 PM	H2 MFC set to  0.000000
7/24/2011	4:07:41 PM	BCl3 MFC set to  0.000000
7/24/2011	4:07:41 PM	PHl3 MFC set to  0.000000
7/24/2011	4:07:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:07:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:07:42 PM	Tube furnace set to 0
7/24/2011	4:08:12 PM	Helium valve closed
7/24/2011	4:08:12 PM	H2 valve closed
7/24/2011	4:08:12 PM	BCl3 valve closed
7/24/2011	4:08:12 PM	PH3 valve closed
7/24/2011	4:08:12 PM	SiCl4 pre valve closed
7/24/2011	4:08:12 PM	SiCl4 post valve closed
7/24/2011	4:08:12 PM	Bypass valve closed
7/24/2011	4:08:12 PM	Bubbler valve closed
7/24/2011	4:08:12 PM	Main Vac valve opened
7/24/2011	4:08:12 PM	Helium MFC set to  0.000000
7/24/2011	4:08:12 PM	H2 MFC set to  0.000000
7/24/2011	4:08:12 PM	BCl3 MFC set to  0.000000
7/24/2011	4:08:12 PM	PHl3 MFC set to  0.000000
7/24/2011	4:08:12 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:08:12 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:08:12 PM	Tube furnace set to 0
7/24/2011	4:08:42 PM	H2 valve closed
7/24/2011	4:08:42 PM	BCl3 valve closed
7/24/2011	4:08:42 PM	PH3 valve closed
7/24/2011	4:08:42 PM	SiCl4 pre valve closed
7/24/2011	4:08:42 PM	SiCl4 post valve closed
7/24/2011	4:08:42 PM	Bypass valve closed
7/24/2011	4:08:42 PM	Bubbler valve closed
7/24/2011	4:08:42 PM	Helium valve opened
7/24/2011	4:08:42 PM	Main Vac valve opened
7/24/2011	4:08:42 PM	Helium MFC set to  20.000000
7/24/2011	4:08:42 PM	H2 MFC set to  0.000000
7/24/2011	4:08:42 PM	BCl3 MFC set to  0.000000
7/24/2011	4:08:42 PM	PHl3 MFC set to  0.000000
7/24/2011	4:08:42 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:08:42 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:08:42 PM	Tube furnace set to 0
7/24/2011	4:09:12 PM	Helium valve closed
7/24/2011	4:09:12 PM	H2 valve closed
7/24/2011	4:09:12 PM	BCl3 valve closed
7/24/2011	4:09:12 PM	PH3 valve closed
7/24/2011	4:09:12 PM	SiCl4 pre valve closed
7/24/2011	4:09:12 PM	SiCl4 post valve closed
7/24/2011	4:09:12 PM	Bypass valve closed
7/24/2011	4:09:12 PM	Bubbler valve closed
7/24/2011	4:09:12 PM	Main Vac valve opened
7/24/2011	4:09:12 PM	Helium MFC set to  0.000000
7/24/2011	4:09:12 PM	H2 MFC set to  0.000000
7/24/2011	4:09:12 PM	BCl3 MFC set to  0.000000
7/24/2011	4:09:12 PM	PHl3 MFC set to  0.000000
7/24/2011	4:09:12 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:09:12 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:09:12 PM	Tube furnace set to 0
7/24/2011	4:09:42 PM	H2 valve closed
7/24/2011	4:09:42 PM	BCl3 valve closed
7/24/2011	4:09:42 PM	PH3 valve closed
7/24/2011	4:09:42 PM	SiCl4 pre valve closed
7/24/2011	4:09:42 PM	SiCl4 post valve closed
7/24/2011	4:09:42 PM	Bypass valve closed
7/24/2011	4:09:42 PM	Bubbler valve closed
7/24/2011	4:09:42 PM	Helium valve opened
7/24/2011	4:09:42 PM	Main Vac valve opened
7/24/2011	4:09:42 PM	Helium MFC set to  20.000000
7/24/2011	4:09:42 PM	H2 MFC set to  0.000000
7/24/2011	4:09:42 PM	BCl3 MFC set to  0.000000
7/24/2011	4:09:42 PM	PHl3 MFC set to  0.000000
7/24/2011	4:09:42 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:09:42 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:09:42 PM	Tube furnace set to 0
7/24/2011	4:10:12 PM	Helium valve closed
7/24/2011	4:10:12 PM	H2 valve closed
7/24/2011	4:10:12 PM	BCl3 valve closed
7/24/2011	4:10:12 PM	PH3 valve closed
7/24/2011	4:10:12 PM	SiCl4 pre valve closed
7/24/2011	4:10:12 PM	SiCl4 post valve closed
7/24/2011	4:10:12 PM	Bypass valve closed
7/24/2011	4:10:12 PM	Bubbler valve closed
7/24/2011	4:10:12 PM	Main Vac valve opened
7/24/2011	4:10:12 PM	Helium MFC set to  0.000000
7/24/2011	4:10:12 PM	H2 MFC set to  0.000000
7/24/2011	4:10:12 PM	BCl3 MFC set to  0.000000
7/24/2011	4:10:12 PM	PHl3 MFC set to  0.000000
7/24/2011	4:10:12 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:10:12 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:10:13 PM	Tube furnace set to 0
7/24/2011	4:10:43 PM	H2 valve closed
7/24/2011	4:10:43 PM	BCl3 valve closed
7/24/2011	4:10:43 PM	PH3 valve closed
7/24/2011	4:10:43 PM	SiCl4 pre valve closed
7/24/2011	4:10:43 PM	SiCl4 post valve closed
7/24/2011	4:10:43 PM	Bypass valve closed
7/24/2011	4:10:43 PM	Bubbler valve closed
7/24/2011	4:10:43 PM	Helium valve opened
7/24/2011	4:10:43 PM	Main Vac valve opened
7/24/2011	4:10:43 PM	Helium MFC set to  20.000000
7/24/2011	4:10:43 PM	H2 MFC set to  0.000000
7/24/2011	4:10:43 PM	BCl3 MFC set to  0.000000
7/24/2011	4:10:43 PM	PHl3 MFC set to  0.000000
7/24/2011	4:10:43 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:10:43 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:10:43 PM	Tube furnace set to 0
7/24/2011	4:11:13 PM	Helium valve closed
7/24/2011	4:11:13 PM	H2 valve closed
7/24/2011	4:11:13 PM	BCl3 valve closed
7/24/2011	4:11:13 PM	PH3 valve closed
7/24/2011	4:11:13 PM	SiCl4 pre valve closed
7/24/2011	4:11:13 PM	SiCl4 post valve closed
7/24/2011	4:11:13 PM	Bypass valve closed
7/24/2011	4:11:13 PM	Bubbler valve closed
7/24/2011	4:11:13 PM	Main Vac valve opened
7/24/2011	4:11:13 PM	Helium MFC set to  0.000000
7/24/2011	4:11:13 PM	H2 MFC set to  0.000000
7/24/2011	4:11:13 PM	BCl3 MFC set to  0.000000
7/24/2011	4:11:13 PM	PHl3 MFC set to  0.000000
7/24/2011	4:11:13 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:11:13 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:11:13 PM	Tube furnace set to 0
7/24/2011	4:11:43 PM	H2 valve closed
7/24/2011	4:11:43 PM	BCl3 valve closed
7/24/2011	4:11:43 PM	PH3 valve closed
7/24/2011	4:11:43 PM	SiCl4 pre valve closed
7/24/2011	4:11:43 PM	SiCl4 post valve closed
7/24/2011	4:11:43 PM	Bypass valve closed
7/24/2011	4:11:43 PM	Bubbler valve closed
7/24/2011	4:11:43 PM	Helium valve opened
7/24/2011	4:11:43 PM	Main Vac valve opened
7/24/2011	4:11:43 PM	Helium MFC set to  20.000000
7/24/2011	4:11:43 PM	H2 MFC set to  0.000000
7/24/2011	4:11:43 PM	BCl3 MFC set to  0.000000
7/24/2011	4:11:43 PM	PHl3 MFC set to  0.000000
7/24/2011	4:11:43 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:11:43 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:11:43 PM	Tube furnace set to 0
7/24/2011	4:12:13 PM	Helium valve closed
7/24/2011	4:12:13 PM	H2 valve closed
7/24/2011	4:12:13 PM	BCl3 valve closed
7/24/2011	4:12:13 PM	PH3 valve closed
7/24/2011	4:12:13 PM	SiCl4 pre valve closed
7/24/2011	4:12:13 PM	SiCl4 post valve closed
7/24/2011	4:12:13 PM	Bypass valve closed
7/24/2011	4:12:13 PM	Bubbler valve closed
7/24/2011	4:12:13 PM	Main Vac valve opened
7/24/2011	4:12:13 PM	Helium MFC set to  0.000000
7/24/2011	4:12:13 PM	H2 MFC set to  0.000000
7/24/2011	4:12:13 PM	BCl3 MFC set to  0.000000
7/24/2011	4:12:13 PM	PHl3 MFC set to  0.000000
7/24/2011	4:12:13 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:12:13 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:12:13 PM	Tube furnace set to 0
7/24/2011	4:12:44 PM	H2 valve closed
7/24/2011	4:12:44 PM	BCl3 valve closed
7/24/2011	4:12:44 PM	PH3 valve closed
7/24/2011	4:12:44 PM	SiCl4 pre valve closed
7/24/2011	4:12:44 PM	SiCl4 post valve closed
7/24/2011	4:12:44 PM	Bypass valve closed
7/24/2011	4:12:44 PM	Bubbler valve closed
7/24/2011	4:12:44 PM	Helium valve opened
7/24/2011	4:12:44 PM	Main Vac valve opened
7/24/2011	4:12:44 PM	Helium MFC set to  20.000000
7/24/2011	4:12:44 PM	H2 MFC set to  0.000000
7/24/2011	4:12:44 PM	BCl3 MFC set to  0.000000
7/24/2011	4:12:44 PM	PHl3 MFC set to  0.000000
7/24/2011	4:12:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:12:44 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:12:44 PM	Tube furnace set to 0
7/24/2011	4:13:14 PM	Helium valve closed
7/24/2011	4:13:14 PM	H2 valve closed
7/24/2011	4:13:14 PM	BCl3 valve closed
7/24/2011	4:13:14 PM	PH3 valve closed
7/24/2011	4:13:14 PM	SiCl4 pre valve closed
7/24/2011	4:13:14 PM	SiCl4 post valve closed
7/24/2011	4:13:14 PM	Bypass valve closed
7/24/2011	4:13:14 PM	Bubbler valve closed
7/24/2011	4:13:14 PM	Main Vac valve opened
7/24/2011	4:13:14 PM	Helium MFC set to  0.000000
7/24/2011	4:13:14 PM	H2 MFC set to  0.000000
7/24/2011	4:13:14 PM	BCl3 MFC set to  0.000000
7/24/2011	4:13:14 PM	PHl3 MFC set to  0.000000
7/24/2011	4:13:14 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:13:14 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:13:14 PM	Tube furnace set to 0
7/24/2011	4:13:44 PM	H2 valve closed
7/24/2011	4:13:44 PM	BCl3 valve closed
7/24/2011	4:13:44 PM	PH3 valve closed
7/24/2011	4:13:44 PM	SiCl4 pre valve closed
7/24/2011	4:13:44 PM	SiCl4 post valve closed
7/24/2011	4:13:44 PM	Bypass valve closed
7/24/2011	4:13:44 PM	Bubbler valve closed
7/24/2011	4:13:44 PM	Helium valve opened
7/24/2011	4:13:44 PM	Main Vac valve opened
7/24/2011	4:13:44 PM	Helium MFC set to  20.000000
7/24/2011	4:13:44 PM	H2 MFC set to  0.000000
7/24/2011	4:13:44 PM	BCl3 MFC set to  0.000000
7/24/2011	4:13:44 PM	PHl3 MFC set to  0.000000
7/24/2011	4:13:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:13:44 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:13:44 PM	Tube furnace set to 0
7/24/2011	4:14:14 PM	Helium valve closed
7/24/2011	4:14:14 PM	H2 valve closed
7/24/2011	4:14:14 PM	BCl3 valve closed
7/24/2011	4:14:14 PM	PH3 valve closed
7/24/2011	4:14:14 PM	SiCl4 pre valve closed
7/24/2011	4:14:14 PM	SiCl4 post valve closed
7/24/2011	4:14:14 PM	Bypass valve closed
7/24/2011	4:14:14 PM	Bubbler valve closed
7/24/2011	4:14:14 PM	Main Vac valve opened
7/24/2011	4:14:14 PM	Helium MFC set to  0.000000
7/24/2011	4:14:14 PM	H2 MFC set to  0.000000
7/24/2011	4:14:14 PM	BCl3 MFC set to  0.000000
7/24/2011	4:14:14 PM	PHl3 MFC set to  0.000000
7/24/2011	4:14:14 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:14:14 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:14:14 PM	Tube furnace set to 0
7/24/2011	4:14:44 PM	H2 valve closed
7/24/2011	4:14:44 PM	BCl3 valve closed
7/24/2011	4:14:44 PM	PH3 valve closed
7/24/2011	4:14:44 PM	SiCl4 pre valve closed
7/24/2011	4:14:44 PM	SiCl4 post valve closed
7/24/2011	4:14:44 PM	Bypass valve closed
7/24/2011	4:14:44 PM	Bubbler valve closed
7/24/2011	4:14:44 PM	Helium valve opened
7/24/2011	4:14:44 PM	Main Vac valve opened
7/24/2011	4:14:44 PM	Helium MFC set to  20.000000
7/24/2011	4:14:44 PM	H2 MFC set to  0.000000
7/24/2011	4:14:44 PM	BCl3 MFC set to  0.000000
7/24/2011	4:14:44 PM	PHl3 MFC set to  0.000000
7/24/2011	4:14:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:14:44 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:14:44 PM	Tube furnace set to 0
7/24/2011	4:15:15 PM	Helium valve closed
7/24/2011	4:15:15 PM	H2 valve closed
7/24/2011	4:15:15 PM	BCl3 valve closed
7/24/2011	4:15:15 PM	PH3 valve closed
7/24/2011	4:15:15 PM	SiCl4 pre valve closed
7/24/2011	4:15:15 PM	SiCl4 post valve closed
7/24/2011	4:15:15 PM	Bypass valve closed
7/24/2011	4:15:15 PM	Bubbler valve closed
7/24/2011	4:15:15 PM	Main Vac valve opened
7/24/2011	4:15:15 PM	Helium MFC set to  0.000000
7/24/2011	4:15:15 PM	H2 MFC set to  0.000000
7/24/2011	4:15:15 PM	BCl3 MFC set to  0.000000
7/24/2011	4:15:15 PM	PHl3 MFC set to  0.000000
7/24/2011	4:15:15 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:15:15 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:15:15 PM	Tube furnace set to 0
7/24/2011	4:15:45 PM	H2 valve closed
7/24/2011	4:15:45 PM	BCl3 valve closed
7/24/2011	4:15:45 PM	PH3 valve closed
7/24/2011	4:15:45 PM	SiCl4 pre valve closed
7/24/2011	4:15:45 PM	SiCl4 post valve closed
7/24/2011	4:15:45 PM	Bypass valve closed
7/24/2011	4:15:45 PM	Bubbler valve closed
7/24/2011	4:15:45 PM	Helium valve opened
7/24/2011	4:15:45 PM	Main Vac valve opened
7/24/2011	4:15:45 PM	Helium MFC set to  20.000000
7/24/2011	4:15:45 PM	H2 MFC set to  0.000000
7/24/2011	4:15:45 PM	BCl3 MFC set to  0.000000
7/24/2011	4:15:45 PM	PHl3 MFC set to  0.000000
7/24/2011	4:15:45 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:15:45 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:15:45 PM	Tube furnace set to 0
7/24/2011	4:16:15 PM	Helium valve closed
7/24/2011	4:16:15 PM	H2 valve closed
7/24/2011	4:16:15 PM	BCl3 valve closed
7/24/2011	4:16:15 PM	PH3 valve closed
7/24/2011	4:16:15 PM	SiCl4 pre valve closed
7/24/2011	4:16:15 PM	SiCl4 post valve closed
7/24/2011	4:16:15 PM	Bypass valve closed
7/24/2011	4:16:15 PM	Bubbler valve closed
7/24/2011	4:16:15 PM	Main Vac valve opened
7/24/2011	4:16:15 PM	Helium MFC set to  0.000000
7/24/2011	4:16:15 PM	H2 MFC set to  0.000000
7/24/2011	4:16:15 PM	BCl3 MFC set to  0.000000
7/24/2011	4:16:15 PM	PHl3 MFC set to  0.000000
7/24/2011	4:16:15 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:16:15 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:16:15 PM	Tube furnace set to 0
7/24/2011	4:16:16 PM	Run finished at 4:16 PM
7/24/2011	4:16:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/24/2011	4:17:30 PM	Main Vac valve closed
7/24/2011	4:17:47 PM	Main Vac valve opened
7/24/2011	4:20:21 PM	Recipe started at 4:20 PM
7/24/2011	4:20:21 PM	Helium valve closed
7/24/2011	4:20:21 PM	H2 valve closed
7/24/2011	4:20:21 PM	BCl3 valve closed
7/24/2011	4:20:21 PM	PH3 valve closed
7/24/2011	4:20:21 PM	SiCl4 pre valve closed
7/24/2011	4:20:21 PM	SiCl4 post valve closed
7/24/2011	4:20:21 PM	Main Vac valve closed
7/24/2011	4:20:21 PM	Bypass valve closed
7/24/2011	4:20:21 PM	Bubbler valve closed
7/24/2011	4:20:21 PM	Helium MFC set to  0.000000
7/24/2011	4:20:21 PM	H2 MFC set to  0.000000
7/24/2011	4:20:21 PM	BCl3 MFC set to  0.000000
7/24/2011	4:20:21 PM	PHl3 MFC set to  0.000000
7/24/2011	4:20:21 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:20:21 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:20:21 PM	Tube furnace set to 0
7/24/2011	4:20:24 PM	Helium valve closed
7/24/2011	4:20:24 PM	BCl3 valve closed
7/24/2011	4:20:24 PM	PH3 valve closed
7/24/2011	4:20:24 PM	SiCl4 pre valve closed
7/24/2011	4:20:24 PM	SiCl4 post valve closed
7/24/2011	4:20:24 PM	Main Vac valve closed
7/24/2011	4:20:24 PM	Bypass valve closed
7/24/2011	4:20:24 PM	Bubbler valve closed
7/24/2011	4:20:24 PM	H2 valve opened
7/24/2011	4:20:24 PM	Helium MFC set to  0.000000
7/24/2011	4:20:24 PM	H2 MFC set to  500.000000
7/24/2011	4:20:24 PM	BCl3 MFC set to  0.000000
7/24/2011	4:20:24 PM	PHl3 MFC set to  0.000000
7/24/2011	4:20:24 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:20:24 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:20:24 PM	Tube furnace set to 0
7/24/2011	4:21:31 PM	Helium valve closed
7/24/2011	4:21:31 PM	BCl3 valve closed
7/24/2011	4:21:31 PM	PH3 valve closed
7/24/2011	4:21:31 PM	SiCl4 pre valve closed
7/24/2011	4:21:31 PM	SiCl4 post valve closed
7/24/2011	4:21:31 PM	Main Vac valve closed
7/24/2011	4:21:31 PM	Bypass valve closed
7/24/2011	4:21:31 PM	H2 valve opened
7/24/2011	4:21:31 PM	Bubbler valve opened
7/24/2011	4:21:31 PM	Helium MFC set to  0.000000
7/24/2011	4:21:31 PM	H2 MFC set to  500.000000
7/24/2011	4:21:31 PM	BCl3 MFC set to  0.000000
7/24/2011	4:21:31 PM	PHl3 MFC set to  0.000000
7/24/2011	4:21:31 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:21:31 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:21:31 PM	Tube furnace set to 0
7/24/2011	4:21:32 PM	Helium valve closed
7/24/2011	4:21:32 PM	BCl3 valve closed
7/24/2011	4:21:32 PM	PH3 valve closed
7/24/2011	4:21:32 PM	SiCl4 pre valve closed
7/24/2011	4:21:32 PM	SiCl4 post valve closed
7/24/2011	4:21:32 PM	Main Vac valve closed
7/24/2011	4:21:32 PM	Bypass valve closed
7/24/2011	4:21:32 PM	H2 valve opened
7/24/2011	4:21:32 PM	Bubbler valve opened
7/24/2011	4:21:32 PM	Helium MFC set to  0.000000
7/24/2011	4:21:32 PM	H2 MFC set to  500.000000
7/24/2011	4:21:32 PM	BCl3 MFC set to  0.000000
7/24/2011	4:21:32 PM	PHl3 MFC set to  0.000000
7/24/2011	4:21:32 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:21:32 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:21:32 PM	Tube furnace set to 1000
7/24/2011	4:41:32 PM	Helium valve closed
7/24/2011	4:41:32 PM	PH3 valve closed
7/24/2011	4:41:32 PM	Main Vac valve closed
7/24/2011	4:41:32 PM	Bypass valve closed
7/24/2011	4:41:32 PM	H2 valve opened
7/24/2011	4:41:32 PM	BCl3 valve opened
7/24/2011	4:41:32 PM	SiCl4 pre valve opened
7/24/2011	4:41:32 PM	SiCl4 post valve opened
7/24/2011	4:41:32 PM	Bubbler valve opened
7/24/2011	4:41:32 PM	Helium MFC set to  0.000000
7/24/2011	4:41:32 PM	H2 MFC set to  500.000000
7/24/2011	4:41:32 PM	BCl3 MFC set to  6.000000
7/24/2011	4:41:32 PM	PHl3 MFC set to  0.000000
7/24/2011	4:41:32 PM	SiCl4 MFC set to  50.000000
7/24/2011	4:41:32 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:41:32 PM	Tube furnace set to 1000
7/24/2011	4:56:32 PM	Helium valve closed
7/24/2011	4:56:32 PM	BCl3 valve closed
7/24/2011	4:56:32 PM	PH3 valve closed
7/24/2011	4:56:32 PM	SiCl4 pre valve closed
7/24/2011	4:56:32 PM	SiCl4 post valve closed
7/24/2011	4:56:32 PM	Main Vac valve closed
7/24/2011	4:56:32 PM	Bypass valve closed
7/24/2011	4:56:32 PM	H2 valve opened
7/24/2011	4:56:32 PM	Bubbler valve opened
7/24/2011	4:56:32 PM	Helium MFC set to  0.000000
7/24/2011	4:56:32 PM	H2 MFC set to  500.000000
7/24/2011	4:56:32 PM	BCl3 MFC set to  0.000000
7/24/2011	4:56:32 PM	PHl3 MFC set to  0.000000
7/24/2011	4:56:32 PM	SiCl4 MFC set to  0.000000
7/24/2011	4:56:32 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	4:56:33 PM	Tube furnace set to 750
7/24/2011	5:01:33 PM	H2 valve closed
7/24/2011	5:01:33 PM	BCl3 valve closed
7/24/2011	5:01:33 PM	PH3 valve closed
7/24/2011	5:01:33 PM	SiCl4 pre valve closed
7/24/2011	5:01:33 PM	SiCl4 post valve closed
7/24/2011	5:01:33 PM	Main Vac valve closed
7/24/2011	5:01:33 PM	Bypass valve closed
7/24/2011	5:01:33 PM	Helium valve opened
7/24/2011	5:01:33 PM	Bubbler valve opened
7/24/2011	5:01:33 PM	Helium MFC set to  500.000000
7/24/2011	5:01:33 PM	H2 MFC set to  0.000000
7/24/2011	5:01:33 PM	BCl3 MFC set to  0.000000
7/24/2011	5:01:33 PM	PHl3 MFC set to  0.000000
7/24/2011	5:01:33 PM	SiCl4 MFC set to  0.000000
7/24/2011	5:01:33 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	5:01:33 PM	Tube furnace set to 0
7/24/2011	5:21:33 PM	Helium valve closed
7/24/2011	5:21:33 PM	H2 valve closed
7/24/2011	5:21:33 PM	BCl3 valve closed
7/24/2011	5:21:33 PM	PH3 valve closed
7/24/2011	5:21:33 PM	SiCl4 pre valve closed
7/24/2011	5:21:33 PM	SiCl4 post valve closed
7/24/2011	5:21:33 PM	Main Vac valve closed
7/24/2011	5:21:33 PM	Bypass valve closed
7/24/2011	5:21:33 PM	Bubbler valve closed
7/24/2011	5:21:33 PM	Helium MFC set to  0.000000
7/24/2011	5:21:33 PM	H2 MFC set to  0.000000
7/24/2011	5:21:33 PM	BCl3 MFC set to  0.000000
7/24/2011	5:21:33 PM	PHl3 MFC set to  0.000000
7/24/2011	5:21:33 PM	SiCl4 MFC set to  0.000000
7/24/2011	5:21:33 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	5:21:33 PM	Tube furnace set to 0
7/24/2011	5:21:34 PM	Run finished at 5:21 PM
7/24/2011	6:21:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/24/2011	6:21:48 PM	Recipe started at 6:21 PM
7/24/2011	6:21:48 PM	Helium valve closed
7/24/2011	6:21:48 PM	H2 valve closed
7/24/2011	6:21:48 PM	BCl3 valve closed
7/24/2011	6:21:48 PM	PH3 valve closed
7/24/2011	6:21:48 PM	SiCl4 pre valve closed
7/24/2011	6:21:48 PM	SiCl4 post valve closed
7/24/2011	6:21:48 PM	Main Vac valve closed
7/24/2011	6:21:48 PM	Bypass valve closed
7/24/2011	6:21:48 PM	Bubbler valve closed
7/24/2011	6:21:48 PM	Helium MFC set to  0.000000
7/24/2011	6:21:48 PM	H2 MFC set to  0.000000
7/24/2011	6:21:48 PM	BCl3 MFC set to  0.000000
7/24/2011	6:21:48 PM	PHl3 MFC set to  0.000000
7/24/2011	6:21:48 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:21:48 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:21:49 PM	Tube furnace set to 0
7/24/2011	6:21:52 PM	H2 valve closed
7/24/2011	6:21:52 PM	BCl3 valve closed
7/24/2011	6:21:52 PM	PH3 valve closed
7/24/2011	6:21:52 PM	SiCl4 pre valve closed
7/24/2011	6:21:52 PM	SiCl4 post valve closed
7/24/2011	6:21:52 PM	Main Vac valve closed
7/24/2011	6:21:52 PM	Bypass valve closed
7/24/2011	6:21:52 PM	Bubbler valve closed
7/24/2011	6:21:52 PM	Helium valve opened
7/24/2011	6:21:52 PM	Helium MFC set to  500.000000
7/24/2011	6:21:52 PM	H2 MFC set to  0.000000
7/24/2011	6:21:52 PM	BCl3 MFC set to  0.000000
7/24/2011	6:21:52 PM	PHl3 MFC set to  0.000000
7/24/2011	6:21:52 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:21:52 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:21:52 PM	Tube furnace set to 0
7/24/2011	6:21:55 PM	Helium valve closed
7/24/2011	6:21:55 PM	H2 valve closed
7/24/2011	6:21:55 PM	BCl3 valve closed
7/24/2011	6:21:55 PM	PH3 valve closed
7/24/2011	6:21:55 PM	SiCl4 pre valve closed
7/24/2011	6:21:55 PM	SiCl4 post valve closed
7/24/2011	6:21:55 PM	Main Vac valve closed
7/24/2011	6:21:55 PM	Bypass valve closed
7/24/2011	6:21:55 PM	Bubbler valve closed
7/24/2011	6:21:55 PM	Helium MFC set to  0.000000
7/24/2011	6:21:55 PM	H2 MFC set to  0.000000
7/24/2011	6:21:55 PM	BCl3 MFC set to  0.000000
7/24/2011	6:21:55 PM	PHl3 MFC set to  0.000000
7/24/2011	6:21:55 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:21:55 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:21:55 PM	Tube furnace set to 0
7/24/2011	6:21:56 PM	Run finished at 6:21 PM
7/24/2011	6:21:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/24/2011	6:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/24/2011	6:26:49 PM	Recipe started at 6:26 PM
7/24/2011	6:26:49 PM	Helium valve closed
7/24/2011	6:26:49 PM	H2 valve closed
7/24/2011	6:26:49 PM	BCl3 valve closed
7/24/2011	6:26:49 PM	PH3 valve closed
7/24/2011	6:26:49 PM	SiCl4 pre valve closed
7/24/2011	6:26:49 PM	SiCl4 post valve closed
7/24/2011	6:26:49 PM	Main Vac valve closed
7/24/2011	6:26:49 PM	Bubbler valve closed
7/24/2011	6:26:49 PM	Bypass valve opened
7/24/2011	6:26:49 PM	Helium MFC set to  0.000000
7/24/2011	6:26:49 PM	H2 MFC set to  0.000000
7/24/2011	6:26:49 PM	BCl3 MFC set to  0.000000
7/24/2011	6:26:49 PM	PHl3 MFC set to  0.000000
7/24/2011	6:26:49 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:26:49 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:26:49 PM	Tube furnace set to 0
7/24/2011	6:27:50 PM	Helium valve closed
7/24/2011	6:27:50 PM	H2 valve closed
7/24/2011	6:27:50 PM	BCl3 valve closed
7/24/2011	6:27:50 PM	PH3 valve closed
7/24/2011	6:27:50 PM	SiCl4 pre valve closed
7/24/2011	6:27:50 PM	SiCl4 post valve closed
7/24/2011	6:27:50 PM	Main Vac valve closed
7/24/2011	6:27:50 PM	Bubbler valve closed
7/24/2011	6:27:50 PM	Bypass valve opened
7/24/2011	6:27:50 PM	Helium MFC set to  0.000000
7/24/2011	6:27:50 PM	H2 MFC set to  0.000000
7/24/2011	6:27:50 PM	BCl3 MFC set to  0.000000
7/24/2011	6:27:50 PM	PHl3 MFC set to  0.000000
7/24/2011	6:27:50 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:27:50 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:27:50 PM	Tube furnace set to 0
7/24/2011	6:28:50 PM	Helium valve closed
7/24/2011	6:28:50 PM	H2 valve closed
7/24/2011	6:28:50 PM	BCl3 valve closed
7/24/2011	6:28:50 PM	PH3 valve closed
7/24/2011	6:28:50 PM	SiCl4 pre valve closed
7/24/2011	6:28:50 PM	SiCl4 post valve closed
7/24/2011	6:28:50 PM	Bypass valve closed
7/24/2011	6:28:50 PM	Bubbler valve closed
7/24/2011	6:28:50 PM	Main Vac valve opened
7/24/2011	6:28:50 PM	Helium MFC set to  0.000000
7/24/2011	6:28:50 PM	H2 MFC set to  0.000000
7/24/2011	6:28:50 PM	BCl3 MFC set to  0.000000
7/24/2011	6:28:50 PM	PHl3 MFC set to  0.000000
7/24/2011	6:28:50 PM	SiCl4 MFC set to  0.000000
7/24/2011	6:28:50 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	6:28:51 PM	Tube furnace set to 0
7/24/2011	6:28:52 PM	Run finished at 6:28 PM
7/24/2011	6:28:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/24/2011	7:01:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/24/2011	7:01:41 PM	Recipe started at 7:01 PM
7/24/2011	7:01:41 PM	Helium valve closed
7/24/2011	7:01:41 PM	H2 valve closed
7/24/2011	7:01:41 PM	BCl3 valve closed
7/24/2011	7:01:41 PM	PH3 valve closed
7/24/2011	7:01:41 PM	SiCl4 pre valve closed
7/24/2011	7:01:41 PM	SiCl4 post valve closed
7/24/2011	7:01:41 PM	Main Vac valve closed
7/24/2011	7:01:41 PM	Bubbler valve closed
7/24/2011	7:01:41 PM	Bypass valve opened
7/24/2011	7:01:41 PM	Helium MFC set to  0.000000
7/24/2011	7:01:41 PM	H2 MFC set to  0.000000
7/24/2011	7:01:41 PM	BCl3 MFC set to  0.000000
7/24/2011	7:01:41 PM	PHl3 MFC set to  0.000000
7/24/2011	7:01:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:01:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:01:41 PM	Tube furnace set to 0
7/24/2011	7:01:41 PM	Helium valve closed
7/24/2011	7:01:41 PM	H2 valve closed
7/24/2011	7:01:41 PM	BCl3 valve closed
7/24/2011	7:01:41 PM	PH3 valve closed
7/24/2011	7:01:41 PM	SiCl4 pre valve closed
7/24/2011	7:01:41 PM	SiCl4 post valve closed
7/24/2011	7:01:41 PM	Main Vac valve closed
7/24/2011	7:01:41 PM	Bubbler valve closed
7/24/2011	7:01:41 PM	Bypass valve opened
7/24/2011	7:01:41 PM	Helium MFC set to  0.000000
7/24/2011	7:01:41 PM	H2 MFC set to  0.000000
7/24/2011	7:01:41 PM	BCl3 MFC set to  0.000000
7/24/2011	7:01:41 PM	PHl3 MFC set to  0.000000
7/24/2011	7:01:41 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:01:41 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:01:41 PM	Tube furnace set to 0
7/24/2011	7:02:11 PM	Helium valve closed
7/24/2011	7:02:11 PM	H2 valve closed
7/24/2011	7:02:11 PM	BCl3 valve closed
7/24/2011	7:02:11 PM	PH3 valve closed
7/24/2011	7:02:11 PM	SiCl4 pre valve closed
7/24/2011	7:02:11 PM	SiCl4 post valve closed
7/24/2011	7:02:11 PM	Bypass valve closed
7/24/2011	7:02:11 PM	Bubbler valve closed
7/24/2011	7:02:11 PM	Main Vac valve opened
7/24/2011	7:02:11 PM	Helium MFC set to  0.000000
7/24/2011	7:02:11 PM	H2 MFC set to  0.000000
7/24/2011	7:02:11 PM	BCl3 MFC set to  0.000000
7/24/2011	7:02:11 PM	PHl3 MFC set to  0.000000
7/24/2011	7:02:11 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:02:11 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:02:12 PM	Tube furnace set to 0
7/24/2011	7:02:42 PM	H2 valve closed
7/24/2011	7:02:42 PM	BCl3 valve closed
7/24/2011	7:02:42 PM	PH3 valve closed
7/24/2011	7:02:42 PM	SiCl4 pre valve closed
7/24/2011	7:02:42 PM	SiCl4 post valve closed
7/24/2011	7:02:42 PM	Bypass valve closed
7/24/2011	7:02:42 PM	Bubbler valve closed
7/24/2011	7:02:42 PM	Helium valve opened
7/24/2011	7:02:42 PM	Main Vac valve opened
7/24/2011	7:02:42 PM	Helium MFC set to  20.000000
7/24/2011	7:02:42 PM	H2 MFC set to  0.000000
7/24/2011	7:02:42 PM	BCl3 MFC set to  0.000000
7/24/2011	7:02:42 PM	PHl3 MFC set to  0.000000
7/24/2011	7:02:42 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:02:42 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:02:42 PM	Tube furnace set to 0
7/24/2011	7:03:12 PM	Helium valve closed
7/24/2011	7:03:12 PM	H2 valve closed
7/24/2011	7:03:12 PM	BCl3 valve closed
7/24/2011	7:03:12 PM	PH3 valve closed
7/24/2011	7:03:12 PM	SiCl4 pre valve closed
7/24/2011	7:03:12 PM	SiCl4 post valve closed
7/24/2011	7:03:12 PM	Bypass valve closed
7/24/2011	7:03:12 PM	Bubbler valve closed
7/24/2011	7:03:12 PM	Main Vac valve opened
7/24/2011	7:03:12 PM	Helium MFC set to  0.000000
7/24/2011	7:03:12 PM	H2 MFC set to  0.000000
7/24/2011	7:03:12 PM	BCl3 MFC set to  0.000000
7/24/2011	7:03:12 PM	PHl3 MFC set to  0.000000
7/24/2011	7:03:12 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:03:12 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:03:12 PM	Tube furnace set to 0
7/24/2011	7:03:42 PM	H2 valve closed
7/24/2011	7:03:42 PM	BCl3 valve closed
7/24/2011	7:03:42 PM	PH3 valve closed
7/24/2011	7:03:42 PM	SiCl4 pre valve closed
7/24/2011	7:03:42 PM	SiCl4 post valve closed
7/24/2011	7:03:42 PM	Bypass valve closed
7/24/2011	7:03:42 PM	Bubbler valve closed
7/24/2011	7:03:42 PM	Helium valve opened
7/24/2011	7:03:42 PM	Main Vac valve opened
7/24/2011	7:03:42 PM	Helium MFC set to  20.000000
7/24/2011	7:03:42 PM	H2 MFC set to  0.000000
7/24/2011	7:03:42 PM	BCl3 MFC set to  0.000000
7/24/2011	7:03:42 PM	PHl3 MFC set to  0.000000
7/24/2011	7:03:42 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:03:42 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:03:42 PM	Tube furnace set to 0
7/24/2011	7:04:12 PM	Helium valve closed
7/24/2011	7:04:12 PM	H2 valve closed
7/24/2011	7:04:12 PM	BCl3 valve closed
7/24/2011	7:04:12 PM	PH3 valve closed
7/24/2011	7:04:12 PM	SiCl4 pre valve closed
7/24/2011	7:04:12 PM	SiCl4 post valve closed
7/24/2011	7:04:12 PM	Bypass valve closed
7/24/2011	7:04:12 PM	Bubbler valve closed
7/24/2011	7:04:12 PM	Main Vac valve opened
7/24/2011	7:04:12 PM	Helium MFC set to  0.000000
7/24/2011	7:04:12 PM	H2 MFC set to  0.000000
7/24/2011	7:04:12 PM	BCl3 MFC set to  0.000000
7/24/2011	7:04:12 PM	PHl3 MFC set to  0.000000
7/24/2011	7:04:12 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:04:12 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:04:12 PM	Tube furnace set to 0
7/24/2011	7:04:42 PM	H2 valve closed
7/24/2011	7:04:42 PM	BCl3 valve closed
7/24/2011	7:04:42 PM	PH3 valve closed
7/24/2011	7:04:42 PM	SiCl4 pre valve closed
7/24/2011	7:04:42 PM	SiCl4 post valve closed
7/24/2011	7:04:42 PM	Bypass valve closed
7/24/2011	7:04:42 PM	Bubbler valve closed
7/24/2011	7:04:42 PM	Helium valve opened
7/24/2011	7:04:42 PM	Main Vac valve opened
7/24/2011	7:04:42 PM	Helium MFC set to  20.000000
7/24/2011	7:04:42 PM	H2 MFC set to  0.000000
7/24/2011	7:04:42 PM	BCl3 MFC set to  0.000000
7/24/2011	7:04:42 PM	PHl3 MFC set to  0.000000
7/24/2011	7:04:42 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:04:42 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:04:43 PM	Tube furnace set to 0
7/24/2011	7:05:13 PM	Helium valve closed
7/24/2011	7:05:13 PM	H2 valve closed
7/24/2011	7:05:13 PM	BCl3 valve closed
7/24/2011	7:05:13 PM	PH3 valve closed
7/24/2011	7:05:13 PM	SiCl4 pre valve closed
7/24/2011	7:05:13 PM	SiCl4 post valve closed
7/24/2011	7:05:13 PM	Bypass valve closed
7/24/2011	7:05:13 PM	Bubbler valve closed
7/24/2011	7:05:13 PM	Main Vac valve opened
7/24/2011	7:05:13 PM	Helium MFC set to  0.000000
7/24/2011	7:05:13 PM	H2 MFC set to  0.000000
7/24/2011	7:05:13 PM	BCl3 MFC set to  0.000000
7/24/2011	7:05:13 PM	PHl3 MFC set to  0.000000
7/24/2011	7:05:13 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:05:13 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:05:13 PM	Tube furnace set to 0
7/24/2011	7:05:43 PM	H2 valve closed
7/24/2011	7:05:43 PM	BCl3 valve closed
7/24/2011	7:05:43 PM	PH3 valve closed
7/24/2011	7:05:43 PM	SiCl4 pre valve closed
7/24/2011	7:05:43 PM	SiCl4 post valve closed
7/24/2011	7:05:43 PM	Bypass valve closed
7/24/2011	7:05:43 PM	Bubbler valve closed
7/24/2011	7:05:43 PM	Helium valve opened
7/24/2011	7:05:43 PM	Main Vac valve opened
7/24/2011	7:05:43 PM	Helium MFC set to  20.000000
7/24/2011	7:05:43 PM	H2 MFC set to  0.000000
7/24/2011	7:05:43 PM	BCl3 MFC set to  0.000000
7/24/2011	7:05:43 PM	PHl3 MFC set to  0.000000
7/24/2011	7:05:43 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:05:43 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:05:43 PM	Tube furnace set to 0
7/24/2011	7:06:13 PM	Helium valve closed
7/24/2011	7:06:13 PM	H2 valve closed
7/24/2011	7:06:13 PM	BCl3 valve closed
7/24/2011	7:06:13 PM	PH3 valve closed
7/24/2011	7:06:13 PM	SiCl4 pre valve closed
7/24/2011	7:06:13 PM	SiCl4 post valve closed
7/24/2011	7:06:13 PM	Bypass valve closed
7/24/2011	7:06:13 PM	Bubbler valve closed
7/24/2011	7:06:13 PM	Main Vac valve opened
7/24/2011	7:06:13 PM	Helium MFC set to  0.000000
7/24/2011	7:06:13 PM	H2 MFC set to  0.000000
7/24/2011	7:06:13 PM	BCl3 MFC set to  0.000000
7/24/2011	7:06:13 PM	PHl3 MFC set to  0.000000
7/24/2011	7:06:13 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:06:13 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:06:13 PM	Tube furnace set to 0
7/24/2011	7:06:43 PM	H2 valve closed
7/24/2011	7:06:43 PM	BCl3 valve closed
7/24/2011	7:06:43 PM	PH3 valve closed
7/24/2011	7:06:43 PM	SiCl4 pre valve closed
7/24/2011	7:06:43 PM	SiCl4 post valve closed
7/24/2011	7:06:43 PM	Bypass valve closed
7/24/2011	7:06:43 PM	Bubbler valve closed
7/24/2011	7:06:43 PM	Helium valve opened
7/24/2011	7:06:43 PM	Main Vac valve opened
7/24/2011	7:06:43 PM	Helium MFC set to  20.000000
7/24/2011	7:06:43 PM	H2 MFC set to  0.000000
7/24/2011	7:06:43 PM	BCl3 MFC set to  0.000000
7/24/2011	7:06:43 PM	PHl3 MFC set to  0.000000
7/24/2011	7:06:43 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:06:43 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:06:43 PM	Tube furnace set to 0
7/24/2011	7:07:13 PM	Helium valve closed
7/24/2011	7:07:13 PM	H2 valve closed
7/24/2011	7:07:13 PM	BCl3 valve closed
7/24/2011	7:07:13 PM	PH3 valve closed
7/24/2011	7:07:13 PM	SiCl4 pre valve closed
7/24/2011	7:07:13 PM	SiCl4 post valve closed
7/24/2011	7:07:13 PM	Bypass valve closed
7/24/2011	7:07:13 PM	Bubbler valve closed
7/24/2011	7:07:13 PM	Main Vac valve opened
7/24/2011	7:07:13 PM	Helium MFC set to  0.000000
7/24/2011	7:07:13 PM	H2 MFC set to  0.000000
7/24/2011	7:07:13 PM	BCl3 MFC set to  0.000000
7/24/2011	7:07:13 PM	PHl3 MFC set to  0.000000
7/24/2011	7:07:13 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:07:13 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:07:14 PM	Tube furnace set to 0
7/24/2011	7:07:44 PM	H2 valve closed
7/24/2011	7:07:44 PM	BCl3 valve closed
7/24/2011	7:07:44 PM	PH3 valve closed
7/24/2011	7:07:44 PM	SiCl4 pre valve closed
7/24/2011	7:07:44 PM	SiCl4 post valve closed
7/24/2011	7:07:44 PM	Bypass valve closed
7/24/2011	7:07:44 PM	Bubbler valve closed
7/24/2011	7:07:44 PM	Helium valve opened
7/24/2011	7:07:44 PM	Main Vac valve opened
7/24/2011	7:07:44 PM	Helium MFC set to  20.000000
7/24/2011	7:07:44 PM	H2 MFC set to  0.000000
7/24/2011	7:07:44 PM	BCl3 MFC set to  0.000000
7/24/2011	7:07:44 PM	PHl3 MFC set to  0.000000
7/24/2011	7:07:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:07:44 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:07:44 PM	Tube furnace set to 0
7/24/2011	7:08:14 PM	Helium valve closed
7/24/2011	7:08:14 PM	H2 valve closed
7/24/2011	7:08:14 PM	BCl3 valve closed
7/24/2011	7:08:14 PM	PH3 valve closed
7/24/2011	7:08:14 PM	SiCl4 pre valve closed
7/24/2011	7:08:14 PM	SiCl4 post valve closed
7/24/2011	7:08:14 PM	Bypass valve closed
7/24/2011	7:08:14 PM	Bubbler valve closed
7/24/2011	7:08:14 PM	Main Vac valve opened
7/24/2011	7:08:14 PM	Helium MFC set to  0.000000
7/24/2011	7:08:14 PM	H2 MFC set to  0.000000
7/24/2011	7:08:14 PM	BCl3 MFC set to  0.000000
7/24/2011	7:08:14 PM	PHl3 MFC set to  0.000000
7/24/2011	7:08:14 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:08:14 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:08:14 PM	Tube furnace set to 0
7/24/2011	7:08:44 PM	H2 valve closed
7/24/2011	7:08:44 PM	BCl3 valve closed
7/24/2011	7:08:44 PM	PH3 valve closed
7/24/2011	7:08:44 PM	SiCl4 pre valve closed
7/24/2011	7:08:44 PM	SiCl4 post valve closed
7/24/2011	7:08:44 PM	Bypass valve closed
7/24/2011	7:08:44 PM	Bubbler valve closed
7/24/2011	7:08:44 PM	Helium valve opened
7/24/2011	7:08:44 PM	Main Vac valve opened
7/24/2011	7:08:44 PM	Helium MFC set to  20.000000
7/24/2011	7:08:44 PM	H2 MFC set to  0.000000
7/24/2011	7:08:44 PM	BCl3 MFC set to  0.000000
7/24/2011	7:08:44 PM	PHl3 MFC set to  0.000000
7/24/2011	7:08:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:08:44 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:08:44 PM	Tube furnace set to 0
7/24/2011	7:09:14 PM	Helium valve closed
7/24/2011	7:09:14 PM	H2 valve closed
7/24/2011	7:09:14 PM	BCl3 valve closed
7/24/2011	7:09:14 PM	PH3 valve closed
7/24/2011	7:09:14 PM	SiCl4 pre valve closed
7/24/2011	7:09:14 PM	SiCl4 post valve closed
7/24/2011	7:09:14 PM	Bypass valve closed
7/24/2011	7:09:14 PM	Bubbler valve closed
7/24/2011	7:09:14 PM	Main Vac valve opened
7/24/2011	7:09:14 PM	Helium MFC set to  0.000000
7/24/2011	7:09:14 PM	H2 MFC set to  0.000000
7/24/2011	7:09:14 PM	BCl3 MFC set to  0.000000
7/24/2011	7:09:14 PM	PHl3 MFC set to  0.000000
7/24/2011	7:09:14 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:09:14 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:09:14 PM	Tube furnace set to 0
7/24/2011	7:09:44 PM	H2 valve closed
7/24/2011	7:09:44 PM	BCl3 valve closed
7/24/2011	7:09:44 PM	PH3 valve closed
7/24/2011	7:09:44 PM	SiCl4 pre valve closed
7/24/2011	7:09:44 PM	SiCl4 post valve closed
7/24/2011	7:09:44 PM	Bypass valve closed
7/24/2011	7:09:44 PM	Bubbler valve closed
7/24/2011	7:09:44 PM	Helium valve opened
7/24/2011	7:09:44 PM	Main Vac valve opened
7/24/2011	7:09:44 PM	Helium MFC set to  20.000000
7/24/2011	7:09:44 PM	H2 MFC set to  0.000000
7/24/2011	7:09:44 PM	BCl3 MFC set to  0.000000
7/24/2011	7:09:44 PM	PHl3 MFC set to  0.000000
7/24/2011	7:09:44 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:09:45 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:09:45 PM	Tube furnace set to 0
7/24/2011	7:10:15 PM	Helium valve closed
7/24/2011	7:10:15 PM	H2 valve closed
7/24/2011	7:10:15 PM	BCl3 valve closed
7/24/2011	7:10:15 PM	PH3 valve closed
7/24/2011	7:10:15 PM	SiCl4 pre valve closed
7/24/2011	7:10:15 PM	SiCl4 post valve closed
7/24/2011	7:10:15 PM	Bypass valve closed
7/24/2011	7:10:15 PM	Bubbler valve closed
7/24/2011	7:10:15 PM	Main Vac valve opened
7/24/2011	7:10:15 PM	Helium MFC set to  0.000000
7/24/2011	7:10:15 PM	H2 MFC set to  0.000000
7/24/2011	7:10:15 PM	BCl3 MFC set to  0.000000
7/24/2011	7:10:15 PM	PHl3 MFC set to  0.000000
7/24/2011	7:10:15 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:10:15 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:10:15 PM	Tube furnace set to 0
7/24/2011	7:10:45 PM	H2 valve closed
7/24/2011	7:10:45 PM	BCl3 valve closed
7/24/2011	7:10:45 PM	PH3 valve closed
7/24/2011	7:10:45 PM	SiCl4 pre valve closed
7/24/2011	7:10:45 PM	SiCl4 post valve closed
7/24/2011	7:10:45 PM	Bypass valve closed
7/24/2011	7:10:45 PM	Bubbler valve closed
7/24/2011	7:10:45 PM	Helium valve opened
7/24/2011	7:10:45 PM	Main Vac valve opened
7/24/2011	7:10:45 PM	Helium MFC set to  20.000000
7/24/2011	7:10:45 PM	H2 MFC set to  0.000000
7/24/2011	7:10:45 PM	BCl3 MFC set to  0.000000
7/24/2011	7:10:45 PM	PHl3 MFC set to  0.000000
7/24/2011	7:10:45 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:10:45 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:10:45 PM	Tube furnace set to 0
7/24/2011	7:11:15 PM	Helium valve closed
7/24/2011	7:11:15 PM	H2 valve closed
7/24/2011	7:11:15 PM	BCl3 valve closed
7/24/2011	7:11:15 PM	PH3 valve closed
7/24/2011	7:11:15 PM	SiCl4 pre valve closed
7/24/2011	7:11:15 PM	SiCl4 post valve closed
7/24/2011	7:11:15 PM	Bypass valve closed
7/24/2011	7:11:15 PM	Bubbler valve closed
7/24/2011	7:11:15 PM	Main Vac valve opened
7/24/2011	7:11:15 PM	Helium MFC set to  0.000000
7/24/2011	7:11:15 PM	H2 MFC set to  0.000000
7/24/2011	7:11:15 PM	BCl3 MFC set to  0.000000
7/24/2011	7:11:15 PM	PHl3 MFC set to  0.000000
7/24/2011	7:11:15 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:11:15 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:11:15 PM	Tube furnace set to 0
7/24/2011	7:11:45 PM	H2 valve closed
7/24/2011	7:11:45 PM	BCl3 valve closed
7/24/2011	7:11:45 PM	PH3 valve closed
7/24/2011	7:11:45 PM	SiCl4 pre valve closed
7/24/2011	7:11:45 PM	SiCl4 post valve closed
7/24/2011	7:11:45 PM	Bypass valve closed
7/24/2011	7:11:45 PM	Bubbler valve closed
7/24/2011	7:11:45 PM	Helium valve opened
7/24/2011	7:11:45 PM	Main Vac valve opened
7/24/2011	7:11:45 PM	Helium MFC set to  20.000000
7/24/2011	7:11:45 PM	H2 MFC set to  0.000000
7/24/2011	7:11:45 PM	BCl3 MFC set to  0.000000
7/24/2011	7:11:45 PM	PHl3 MFC set to  0.000000
7/24/2011	7:11:45 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:11:45 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:11:46 PM	Tube furnace set to 0
7/24/2011	7:12:16 PM	Helium valve closed
7/24/2011	7:12:16 PM	H2 valve closed
7/24/2011	7:12:16 PM	BCl3 valve closed
7/24/2011	7:12:16 PM	PH3 valve closed
7/24/2011	7:12:16 PM	SiCl4 pre valve closed
7/24/2011	7:12:16 PM	SiCl4 post valve closed
7/24/2011	7:12:16 PM	Bypass valve closed
7/24/2011	7:12:16 PM	Bubbler valve closed
7/24/2011	7:12:16 PM	Main Vac valve opened
7/24/2011	7:12:16 PM	Helium MFC set to  0.000000
7/24/2011	7:12:16 PM	H2 MFC set to  0.000000
7/24/2011	7:12:16 PM	BCl3 MFC set to  0.000000
7/24/2011	7:12:16 PM	PHl3 MFC set to  0.000000
7/24/2011	7:12:16 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:12:16 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:12:16 PM	Tube furnace set to 0
7/24/2011	7:12:17 PM	Run finished at 7:12 PM
7/24/2011	7:12:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/24/2011	7:13:05 PM	Main Vac valve closed
7/24/2011	7:13:22 PM	Main Vac valve opened
7/24/2011	7:13:47 PM	Recipe started at 7:13 PM
7/24/2011	7:13:47 PM	Helium valve closed
7/24/2011	7:13:47 PM	H2 valve closed
7/24/2011	7:13:47 PM	BCl3 valve closed
7/24/2011	7:13:47 PM	PH3 valve closed
7/24/2011	7:13:47 PM	SiCl4 pre valve closed
7/24/2011	7:13:47 PM	SiCl4 post valve closed
7/24/2011	7:13:47 PM	Main Vac valve closed
7/24/2011	7:13:47 PM	Bypass valve closed
7/24/2011	7:13:47 PM	Bubbler valve closed
7/24/2011	7:13:47 PM	Helium MFC set to  0.000000
7/24/2011	7:13:47 PM	H2 MFC set to  0.000000
7/24/2011	7:13:47 PM	BCl3 MFC set to  0.000000
7/24/2011	7:13:47 PM	PHl3 MFC set to  0.000000
7/24/2011	7:13:47 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:13:47 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:13:47 PM	Tube furnace set to 0
7/24/2011	7:13:50 PM	Helium valve closed
7/24/2011	7:13:50 PM	BCl3 valve closed
7/24/2011	7:13:50 PM	PH3 valve closed
7/24/2011	7:13:50 PM	SiCl4 pre valve closed
7/24/2011	7:13:50 PM	SiCl4 post valve closed
7/24/2011	7:13:50 PM	Main Vac valve closed
7/24/2011	7:13:50 PM	Bypass valve closed
7/24/2011	7:13:50 PM	Bubbler valve closed
7/24/2011	7:13:50 PM	H2 valve opened
7/24/2011	7:13:50 PM	Helium MFC set to  0.000000
7/24/2011	7:13:50 PM	H2 MFC set to  500.000000
7/24/2011	7:13:50 PM	BCl3 MFC set to  0.000000
7/24/2011	7:13:50 PM	PHl3 MFC set to  0.000000
7/24/2011	7:13:50 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:13:50 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:13:50 PM	Tube furnace set to 0
7/24/2011	7:14:55 PM	Helium valve closed
7/24/2011	7:14:55 PM	BCl3 valve closed
7/24/2011	7:14:55 PM	PH3 valve closed
7/24/2011	7:14:55 PM	SiCl4 pre valve closed
7/24/2011	7:14:55 PM	SiCl4 post valve closed
7/24/2011	7:14:55 PM	Main Vac valve closed
7/24/2011	7:14:55 PM	Bypass valve closed
7/24/2011	7:14:55 PM	H2 valve opened
7/24/2011	7:14:55 PM	Bubbler valve opened
7/24/2011	7:14:55 PM	Helium MFC set to  0.000000
7/24/2011	7:14:55 PM	H2 MFC set to  500.000000
7/24/2011	7:14:55 PM	BCl3 MFC set to  0.000000
7/24/2011	7:14:55 PM	PHl3 MFC set to  0.000000
7/24/2011	7:14:55 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:14:55 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:14:55 PM	Tube furnace set to 0
7/24/2011	7:14:56 PM	Helium valve closed
7/24/2011	7:14:56 PM	BCl3 valve closed
7/24/2011	7:14:56 PM	PH3 valve closed
7/24/2011	7:14:56 PM	SiCl4 pre valve closed
7/24/2011	7:14:56 PM	SiCl4 post valve closed
7/24/2011	7:14:56 PM	Main Vac valve closed
7/24/2011	7:14:56 PM	Bypass valve closed
7/24/2011	7:14:56 PM	H2 valve opened
7/24/2011	7:14:56 PM	Bubbler valve opened
7/24/2011	7:14:56 PM	Helium MFC set to  0.000000
7/24/2011	7:14:56 PM	H2 MFC set to  500.000000
7/24/2011	7:14:56 PM	BCl3 MFC set to  0.000000
7/24/2011	7:14:56 PM	PHl3 MFC set to  0.000000
7/24/2011	7:14:56 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:14:56 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:14:56 PM	Tube furnace set to 1000
7/24/2011	7:34:56 PM	Helium valve closed
7/24/2011	7:34:56 PM	PH3 valve closed
7/24/2011	7:34:56 PM	Main Vac valve closed
7/24/2011	7:34:56 PM	Bypass valve closed
7/24/2011	7:34:56 PM	H2 valve opened
7/24/2011	7:34:56 PM	BCl3 valve opened
7/24/2011	7:34:56 PM	SiCl4 pre valve opened
7/24/2011	7:34:56 PM	SiCl4 post valve opened
7/24/2011	7:34:56 PM	Bubbler valve opened
7/24/2011	7:34:56 PM	Helium MFC set to  0.000000
7/24/2011	7:34:56 PM	H2 MFC set to  500.000000
7/24/2011	7:34:56 PM	BCl3 MFC set to  6.000000
7/24/2011	7:34:56 PM	PHl3 MFC set to  0.000000
7/24/2011	7:34:56 PM	SiCl4 MFC set to  50.000000
7/24/2011	7:34:56 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:34:56 PM	Tube furnace set to 1000
7/24/2011	7:49:56 PM	Helium valve closed
7/24/2011	7:49:56 PM	BCl3 valve closed
7/24/2011	7:49:56 PM	PH3 valve closed
7/24/2011	7:49:56 PM	SiCl4 pre valve closed
7/24/2011	7:49:56 PM	SiCl4 post valve closed
7/24/2011	7:49:56 PM	Main Vac valve closed
7/24/2011	7:49:56 PM	Bypass valve closed
7/24/2011	7:49:56 PM	H2 valve opened
7/24/2011	7:49:56 PM	Bubbler valve opened
7/24/2011	7:49:56 PM	Helium MFC set to  0.000000
7/24/2011	7:49:56 PM	H2 MFC set to  500.000000
7/24/2011	7:49:56 PM	BCl3 MFC set to  0.000000
7/24/2011	7:49:56 PM	PHl3 MFC set to  0.000000
7/24/2011	7:49:56 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:49:56 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:49:56 PM	Tube furnace set to 750
7/24/2011	7:54:56 PM	H2 valve closed
7/24/2011	7:54:56 PM	BCl3 valve closed
7/24/2011	7:54:56 PM	PH3 valve closed
7/24/2011	7:54:56 PM	SiCl4 pre valve closed
7/24/2011	7:54:56 PM	SiCl4 post valve closed
7/24/2011	7:54:56 PM	Main Vac valve closed
7/24/2011	7:54:56 PM	Bypass valve closed
7/24/2011	7:54:56 PM	Helium valve opened
7/24/2011	7:54:56 PM	Bubbler valve opened
7/24/2011	7:54:56 PM	Helium MFC set to  500.000000
7/24/2011	7:54:56 PM	H2 MFC set to  0.000000
7/24/2011	7:54:56 PM	BCl3 MFC set to  0.000000
7/24/2011	7:54:56 PM	PHl3 MFC set to  0.000000
7/24/2011	7:54:56 PM	SiCl4 MFC set to  0.000000
7/24/2011	7:54:56 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	7:54:57 PM	Tube furnace set to 0
7/24/2011	8:14:57 PM	Helium valve closed
7/24/2011	8:14:57 PM	H2 valve closed
7/24/2011	8:14:57 PM	BCl3 valve closed
7/24/2011	8:14:57 PM	PH3 valve closed
7/24/2011	8:14:57 PM	SiCl4 pre valve closed
7/24/2011	8:14:57 PM	SiCl4 post valve closed
7/24/2011	8:14:57 PM	Main Vac valve closed
7/24/2011	8:14:57 PM	Bypass valve closed
7/24/2011	8:14:57 PM	Bubbler valve closed
7/24/2011	8:14:57 PM	Helium MFC set to  0.000000
7/24/2011	8:14:57 PM	H2 MFC set to  0.000000
7/24/2011	8:14:57 PM	BCl3 MFC set to  0.000000
7/24/2011	8:14:57 PM	PHl3 MFC set to  0.000000
7/24/2011	8:14:57 PM	SiCl4 MFC set to  0.000000
7/24/2011	8:14:57 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	8:14:57 PM	Tube furnace set to 0
7/24/2011	8:14:58 PM	Run finished at 8:14 PM
7/24/2011	10:11:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/24/2011	10:11:50 PM	Recipe started at 10:11 PM
7/24/2011	10:11:50 PM	Helium valve closed
7/24/2011	10:11:50 PM	H2 valve closed
7/24/2011	10:11:50 PM	BCl3 valve closed
7/24/2011	10:11:50 PM	PH3 valve closed
7/24/2011	10:11:50 PM	SiCl4 pre valve closed
7/24/2011	10:11:50 PM	SiCl4 post valve closed
7/24/2011	10:11:50 PM	Main Vac valve closed
7/24/2011	10:11:50 PM	Bubbler valve closed
7/24/2011	10:11:50 PM	Bypass valve opened
7/24/2011	10:11:50 PM	Helium MFC set to  0.000000
7/24/2011	10:11:50 PM	H2 MFC set to  0.000000
7/24/2011	10:11:50 PM	BCl3 MFC set to  0.000000
7/24/2011	10:11:50 PM	PHl3 MFC set to  0.000000
7/24/2011	10:11:50 PM	SiCl4 MFC set to  0.000000
7/24/2011	10:11:50 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	10:11:50 PM	Tube furnace set to 0
7/24/2011	10:12:47 PM	Helium valve closed
7/24/2011	10:12:47 PM	H2 valve closed
7/24/2011	10:12:47 PM	BCl3 valve closed
7/24/2011	10:12:47 PM	PH3 valve closed
7/24/2011	10:12:47 PM	SiCl4 pre valve closed
7/24/2011	10:12:47 PM	SiCl4 post valve closed
7/24/2011	10:12:47 PM	Main Vac valve closed
7/24/2011	10:12:47 PM	Bubbler valve closed
7/24/2011	10:12:47 PM	Bypass valve opened
7/24/2011	10:12:47 PM	Helium MFC set to  0.000000
7/24/2011	10:12:47 PM	H2 MFC set to  0.000000
7/24/2011	10:12:47 PM	BCl3 MFC set to  0.000000
7/24/2011	10:12:47 PM	PHl3 MFC set to  0.000000
7/24/2011	10:12:47 PM	SiCl4 MFC set to  0.000000
7/24/2011	10:12:47 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	10:12:47 PM	Tube furnace set to 0
7/24/2011	10:13:47 PM	Helium valve closed
7/24/2011	10:13:47 PM	H2 valve closed
7/24/2011	10:13:47 PM	BCl3 valve closed
7/24/2011	10:13:47 PM	PH3 valve closed
7/24/2011	10:13:47 PM	SiCl4 pre valve closed
7/24/2011	10:13:47 PM	SiCl4 post valve closed
7/24/2011	10:13:47 PM	Bypass valve closed
7/24/2011	10:13:47 PM	Bubbler valve closed
7/24/2011	10:13:47 PM	Main Vac valve opened
7/24/2011	10:13:47 PM	Helium MFC set to  0.000000
7/24/2011	10:13:47 PM	H2 MFC set to  0.000000
7/24/2011	10:13:47 PM	BCl3 MFC set to  0.000000
7/24/2011	10:13:47 PM	PHl3 MFC set to  0.000000
7/24/2011	10:13:47 PM	SiCl4 MFC set to  0.000000
7/24/2011	10:13:47 PM	Bypass solenoid MFC set to  0.000000
7/24/2011	10:13:47 PM	Tube furnace set to 0
7/24/2011	10:13:48 PM	Run finished at 10:13 PM
7/24/2011	10:13:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
